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Overview of Services

ASU NanoFab is a flexible nano-processing facility at Arizona State University that offers state-of-the-art device processing and characterization tools for university research and for external company prototype development. Established companies and innovative start-ups especially can benefit from using this advanced facility to accelerate their prototype development. We provide the facility, equipment and resources for a full range of operations—from the wet world of biosystems and chemistry to the dry world of inorganic materials, as well as the hybrid structures in between.

Our core strengths are nanofabrication, unique silicon processing, molecular- and bio-electronics, micro-electro-mechanical-systems (MEMS), nano-fluidics, optoelectronics and device characterization. Users of the facility can also take advantage of the skilled staff, several of whom have more than 25 years of experience in this area.

Whatever your requirements—from single molecule fabrication to systems on a chip and beyond—ASU NanoFab can enable and enhance your research and development needs. The NanoFab utilizes an advisory committee for both operational and strategic advice.  Begun in 1981, this facility, serving the Southwest,  was one of the ten nanofabs affiliated with the NNIN initiative.  


Kevin Hilgers


Location and hours of operation

Staffed Hours Location

8 am - 5 pm

Monday - Friday

551 E Tyler Mall

ENGRC - Engineering Research Center

Arizona State University

Tempe, AZ 85287-6206


Please click "here" for our interactive campus map!

Links and Resources

  1. ASU NanoFab Home Page


Name Role Phone Email Location
Kevin Hilgers

(480) 965-5256
ERC 153

Services List

Search available services: View: by category alphabetically
Service Request Charges (2)
Cleanroom - Standard (1)
Cleanroom - 20+ Hrs Discount (1)

Available Equipment and Resources

Characterization (1)
Dry Etch (10)
Lithography (7)
Thermal (10)
Thin Films (11)
Wet Benches (1)